November 04, 2009 17:09 ET

Major Japanese Semiconductor Device Manufacturer Purchases Sela's New Xact TEM/STEM Sample Preparation System

Semiconductor Device Manufacturer Adopts Sela Xact Tool for Enhancing Critical Failure Analysis and Advanced Process Monitoring

YOKNEAM, ISRAEL--(Marketwire - November 4, 2009) - A major Japanese semiconductor device manufacturer has purchased and qualified Sela's new Xact sample preparation system. The system has been fully operational and qualified since Q2 2009, with high reliability.

The Xact system is the first TEM/STEM sample preparation system using Adaptive Ion Milling (AIM) technology. Exceeding traditional ion beam technologies, Sela's new AIM technology can reduce sample thickness routinely to 30 nanometers and thinner over a large area with high precision, artifact-free quality at higher throughput with precise end-point detection.

The customer reports the Xact system proved multiple advantages for TEM imaging including highest quality samples, automated operation, high throughput, ease of use, and was quick to install and qualify. These capabilities reduce TEM lab turnaround time and enhance productivity.

Commented Colin Smith, Sela CEO, "Xact is an ideal tool for dedicated TEM/STEM specimen preparation. There is an expanding need to improve the quality and robustness of TEM sample preparation. Xact specifically addresses limitations of FIB and other technologies. We are pleased this major Japanese device maker thoroughly evaluated and endorses Xact as tool of choice for TEM sample preparation."

About Sela: Sela, Ltd. is a leading supplier of automated SEM and TEM sample preparation equipment for the semiconductor industry. Sela's new Xact system incorporates proprietary Adaptive Ion Milling to create leading edge quality samples for TEM that meet needs for industry technology roadmap for multiple generations. Sela's proprietary Microcleaving technology for SEM is unique in its ability to create precision cross-sections without water, chemical or mechanical contact, and to enable analysis of mirror images of a targeted feature. Camtek Ltd of Migdal Haemek, Israel, announced its acquisition of Sela, Ltd. on September 24, 2009. For more information, go to and

Contact Information

  • Sela Company Contact:
    Carmen Lee
    Sela USA
    Email Contact

    Agency Contact:
    Bruce Kirkpatrick
    Kirkpatrick Communications, Inc.
    Email Contact