SOURCE: Mattson Technology, Inc.

Mattson Technology, Inc.

December 16, 2009 08:30 ET

Mattson Technology Receives Multiple Suprema® Photoresist System Orders From Leading Foundry Customer

FREMONT, CA--(Marketwire - December 16, 2009) - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that one of the leading semiconductor foundries based in Asia has placed multiple orders for the Company's Suprema® photoresist strip system. The Company noted that the Suprema systems would be used for all dry strip applications including the high dose implant strip (HDIS), which is the most difficult dry strip process. The tool shipments will start in the current quarter and continue into the first half of 2010.

Sr. Vice President and General Manager of Mattson Technology's Plasma Products Group, Randy Matsuda, noted, "Suprema continues to gain acceptance as the most production-worthy dry strip system from our customers around the globe. This selection by our long-standing customer is a further testament to Suprema's advantages in high reliability and productivity, coupled with enabling process performance and flexibility." Matsuda added, "The HDIS process qualified for production at the customer site is one of the most challenging in the industry. For the formation of shallow junctions in advanced devices, it is critical that we minimize the silicon loss following a clean removal of heavily implanted photoresist. We are very pleased that the Suprema is able to deliver exceptional performance in meeting the customer's most critical HDIS challenges. We look forward to supporting the customer as they continue to make technology advancements."

About Mattson Technology, Inc.

Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet:

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

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