SOURCE: Mattson Technology, Inc.

Mattson Technology, Inc.

April 12, 2010 06:30 ET

Mattson Technology's Millios™ Flash RTP System Recognized as Process of Record for Millisecond Anneal Processing

FREMONT, CA--(Marketwire - April 12, 2010) -  Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has received final acceptance on the Millios™ flash Rapid Thermal Processing system, which had previously shipped to a leading global semiconductor manufacturing facility in Asia. Featuring state-of-the-art technology, the Millios system had been under production qualification in millisecond anneal applications for advanced logic devices.

Andreas Toennis, senior vice president and general manager of Mattson Technology's Thermal Products Group, noted, "We are extremely pleased that our long-standing customer has expressed further confidence in Mattson Technology and our leadership in advanced thermal processing. This Millios recognition from the customer is testament to our unique advantages in millisecond anneal applications resulting in improved device performance and yield. In addition, the system was evaluated for its production capability and has shown to meet or exceed all expectations while demonstrating industry-leading throughput. The Millios is capable of delivering greater than two times the throughput of the competitive advanced annealing systems."

Toennis added, "The Millios offers full manufacturing control capability while delivering a very unique and patented process flexibility with the ability to combine spike and millisecond anneals, as well as pulsed annealing, which no other competitor offers. We provide millisecond flash on top of spike anneal with intermediate temperatures ranging from 250 to 1050 degrees Celsius, enabling the formation of advanced silicides and ultra-shallow junctions for addressing advanced 45nm and beyond processing. In addition, the system offers the most advanced temperature measurement and control capability for the device side of the wafer, with real time temperature control during the flash step, resulting in unprecedented process control."

About Mattson Technology, Inc.
Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet:

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Contact Information

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    Mattson Technology, Inc.
    tel (510) 492-6190
    fax (510) 492-5930

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