SOURCE: CyberOptics Semiconductor, Inc.

October 22, 2008 10:35 ET

Process Engineers at ISMI Symposium Examine Role of Machine-Vision Technology in Robot Teaching for Endura Cluster Tool; Presentation by CyberOptics Semiconductor's CTO

Presentation to Address a 600 Percent Increase in Tool Production at 300mm Fab; Delivered on Wed., Oct. 22 at 2:25 in Bergstrom Ballroom BC; Company to Demonstrate Complete WaferSense Line for Fabs at Symposium

AUSTIN, TX and BEAVERTON, OR--(Marketwire - October 22, 2008) - Leaders of the chip making industry have assembled in Austin, Texas this week to examine, in part, equipment productivity at the ISMI Symposium On Manufacturing Effectiveness, including details presented by Dennis J. Bonciolini -- the CTO of CyberOptics Semiconductor -- of a 300mm fab's implementation of wireless machine-vision devices to teach robot wafer-transfer coordinates and improve tool production time 600 percent.

At the 5th annual symposium, which offers attendees information to reduce manufacturing expenses and increase productivity, Bonciolini will discuss how process engineers working with an Endura platform vented or cooled process chambers during attempts to establish wafer-transfer coordinates for teaching robots. The engineers essentially operated without the proper tools to identify targets inside equipment.

The process engineers' manual teaching methods led to extended equipment setup and maintenance time, human interference and avenues for wafer particulate contamination, according to the company, a subsidiary of CyberOptics Corp. (NASDAQ: CYBE).

Bonciolini's presentation will address how the fab implemented a wafer-like device that uses machine-vision technology to capture real-time shots of critical targets with the Endura. The device's on-board camera obtained live video and reported in real-time the device's coordinates in relation to a target via companion software.

The device allowed the chip maker to save 20 hours of equipment time, according to Bonciolini. He added that the chip maker implemented the device at tools fab-wide after obtaining data from the implementation.

Bonciolini will deliver his presentation titled "A Case Study for Improved Robot Teaching Methodology On 300mm Endura" on Wednesday, Oct. 22 at 2:25 p.m. at the Bergstrom Ballroom BC in the Hilton Austin Airport. The abstract can be viewed here: http://ismi.sematech.org/ismisymposium/abstracts/06041613039.pdf. Bonciolini was also a guest speaker this week at two ISMI workshops on predictive maintenance and second source parts.

"This is really a great event for suppliers and manufacturers to get together and address industry challenges, and I'm certainly glad we'll be able to contribute and talk about our experience teaching robots in the Endura cluster tool," Bonciolini said.

The device featured in the presentation, the WaferSense Auto Teaching System (ATS), obtains the three-axis (x, y, z) coordinates needed to establish optimal transfers and uniform process results.

CyberOptics Semiconductor, a maker of wireless metrology devices for wafer processing equipment, will demonstrate the ATS and its entire line of WaferSense products at the symposium, including its Auto Vibration System (AVS), Auto Leveling System (ALS2 Vertical) and Auto Gapping System (AGS). Each device follows the processing life of a wafer and reports real-time metrology data.

The ATS is available in 200 and 300 mm form factors and has an accuracy of +/-0.1 mm (X and Y positions) and +/-0.5 mm (Z position).

The WaferSense ATS package includes the teaching wafer, USB-compatible link, TeachView™ and TeachTarget™ software CD, charging case and suitcase.

About CyberOptics Semiconductor, Inc.

CyberOptics Semiconductor develops automated products that seamlessly measure critical parameters in semiconductor fabrication processes and equipment. The company's pioneering WaferSense™ line includes wireless metrology devices for vibration, leveling, gapping and teaching semiconductor process equipment. The company is the largest producer of reflective wafer-mapping sensors and a leading provider of frame grabber machine vision boards under its HAMA Sensors™ and Imagenation™ brands. CyberOptics Semiconductor is a subsidiary of CyberOptics Corp. (NASDAQ: CYBE), one of the world's leading providers of process yield and throughput improvement solutions for electronic assembly and semiconductor capital equipment companies. For information, visit http://www.cyberopticssemi.com/, e-mail CSsales@cyberoptics.com or call 800-366-9131.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995: Statements regarding the Company's anticipated performance are forward-looking and therefore involve risks and uncertainties, including but not limited to: market conditions in the global SMT and semiconductor capital equipment industries; increasing price competition and price pressure on our product sales, particularly our SMT systems; the level of orders from our OEM customers; the availability of parts required for meeting customer orders; the effect of world events on our sales, the majority of which are from foreign customers; product introductions and pricing by our competitors; unanticipated costs or delays associated with the transition of engineering and manufacturing for SMT Systems to Singapore and other factors set forth in the Company's filings with the Securities and Exchange Commission.

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