SOURCE: ATMI Packaging

February 21, 2006 13:08 ET

ATMI and TEL Collaborate to Introduce Next Generation Pressure Dispense Technology

New Innovative PDMPak Chemical Delivery System Eliminates Microbubbles for Advanced Photoresist

SAN JOSE, CA -- (MARKET WIRE) -- February 21, 2006 --MICROLITHOGRAPHY CONFERENCE -- ATMI Packaging, (NASDAQ: ATMI) the source for process efficiency and leader in smart and active materials handling for the global semiconductor industry, today launches a packaging system specifically designed for direct pressure dispensing of advanced photoresist chemicals. Developed in collaboration with Tokyo Electron Ltd. (TEL) of Japan, the PDMPak™ system will greatly improve efficiencies in the photoresist dispense process by enabling an improved track design while also minimizing microbubbles and misconnects.

"ATMI Packaging's collaboration efforts on PDMPak has ensured a successful release and provided a delivery system for TEL's next generation pump system," said Katsuhiro Tsuchiya, Tokyo Electron's Clean Track Product marketing representative.

TEL, the leading track supplier according to VLSI Research, Inc, worked with ATMI to develop a comprehensive pressure dispense solution that actively improves the materials' integrity by significantly streamlining the chemical delivery system for the semiconductor manufacturing industry. The new yield-increasing technology provides end-users with the ability to reduce material waste, and equipment maintenance, ultimately giving customers a consistent and unparalleled value platform.

"This joint development between TEL and ATMI Packaging is a significant step in improving overall process efficiency among materials handling systems within the semiconductor industry," said Risto Puhakka, president, VLSI Research. "ATMI is taking a bold step with the introduction of a new value-driven materials handling solution, which is bringing unprecedented innovation to the materials handling sector of semiconductor manufacturing."

PDMPak evolved from ATMI's industry leading NOWPak® technology and is the industry's first direct pressure dispense ultra-pure, bag-in-a-bottle system. In operation, the PDMPak allows for removal of headspace gas prior to dispensing, prevents solvent loss, isolates chemicals from drive gas contamination and enables chemicals to last longer. In addition, the PDMPak has a new ergonomic connector design providing a cost-saving misconnect-prevention feature. This new design utilizes a locking closure in combination with either a mechanical key-code or ATMI's nowTRAK™ RFID chemical management system.

"We worked in collaboration with TEL to integrate the package into the photoresist process, recognizing that packaging solutions need to play an active role in the handling and dispensing of critical materials. ATMI's ability to offer this level of innovation showcases our dedication to working closely with our customers to develop valuable process efficiency solutions," said Dan Nelson, vice president and general manager, ATMI Packaging. "ATMI is taking a fresh approach to our product development strategy and our customers and partners will continue to see industry-changing technology developments from ATMI."

For more information about ATMI's PDMPak solution, including technical specifications and data sheets, please visit


Based in Minneapolis, Minn., ATMI Packaging, a part of ATMI, Inc. is the source for process efficiency and leader in smart and active materials handling for the global semiconductor industry. Delivering high quality materials-handling solutions, ATMI Packaging applies RFID technology with enhanced safety and functionality to increase the mobility of complex chemistries. Focused on the chemical supplier, semiconductor equipment supplier and chip-makers, its products and technologies are utilized worldwide by semiconductor and flat panel display companies. Recognized for its innovative NOWPak containers and its critical materials management solutions, ATMI Packaging develops products that enhance yields and lower costs.


ATMI provides specialty materials and high-purity materials handling and delivery solutions to the worldwide semiconductor industry. For more information, please visit

© 2006 All rights reserved. Advanced Technology Materials, Inc.

ATMI, PDMPak, nowTRAK and NOWPak are trademarks of Advanced Technology Materials, Inc.

Statements contained herein that relate to ATMI's future performance, including, without limitation, statements with respect to ATMI's anticipated results of operations or level of business for 2006 or any other future period, are forward-looking statements within the safe harbor provisions of the Private Securities Litigation Reform Act of 1995. Such statements are based on current expectations only and are subject to certain risks, uncertainties, and assumptions, including, but not limited to, changes in semiconductor industry growth (including, without limitation, wafer starts) or ATMI's markets; competition, problems, or delays developing and commercializing new products; problems or delays in integrating acquired operations and businesses; and other factors described in ATMI's filings with the Securities and Exchange Commission. Such risks and uncertainties may cause actual results to differ materially from those expressed in our forward-looking statements. ATMI undertakes no obligation to update any forward-looking statements.