SOURCE: Busch Vacuum Pumps and Systems

Busch Vacuum Pumps and Systems

July 09, 2015 08:00 ET

Busch Introduces a New Class for Energy Efficiency in Vacuum Pumps

Premium Efficiency Vacuum Pumps Yield Significant Cost Saving Benefits Across a Variety of Applications

VIRGINIA BEACH, VA--(Marketwired - Jul 9, 2015) - In response to today's demand for maximum energy efficiency, Busch Vacuum Pumps and Systems, one of the world's largest manufacturers of vacuum pumps, blowers, and compressors for industrial applications, is introducing a new Premium Efficiency class of vacuum pumps and system solutions. Busch's Premium Efficiency vacuum pumps pair leading technologies with operational features that set new standards in energy and life cycle efficiency. Up to 40% savings on energy operating costs can be realized due to a number of unique advantages, including integrated technology platforms, reduced maintenance and life cycle costs, and environmental sustainability through reduced footprints.

The first in the Busch Premium Efficiency class of vacuum pumps is being introduced next week at the semiconductor industry's annual SEMICON West trade show in San Francisco. The Busch COBRA BC Premium Efficiency energy-efficient twin-screw vacuum pumps are designed for a range of manufacturing applications across the fab, including process environments with light to harsh operating conditions, and for pumping ranges from 100-2,000 m3/hr. The vacuum pumps' small footprints allow for pump stacking, reducing demands on expensive subfab real estate, and most significantly, they offer both substantial power reduction and increased mean-time-between-failure (MTBF) for reduced fab operating cost.

A recent drive toward reducing power consumption used by vacuum pumps across semiconductor fabs has focused on vacuum systems used in light-duty load locks and transfer chambers. The new Busch COBRA BC Premium Efficiency vacuum pumps are designed not only for these applications, but also for operating within the often-harsh environments of semiconductor process chemistries. The Premium Efficiency class offers a significant power reduction advantage compared with standard vacuum pumps, with savings of up to 40% over existing pump installations. These power savings, combined with increased MTBF of the Busch COBRA BC Premium Efficiency vacuum pumps, represent substantial operating cost savings within the fab. Additionally, local governments may also provide energy-use rebates to fab operators to help offset some of the initial capital investment costs for the new pumps.

Busch COBRA BC Premium Efficiency vacuum pumps rely on the company's proven twin, dry screw technology, which ensures the shortest possible gas path between the pump's inlet and outlet, and reduces the risk of process buildup within the vacuum pump. To improve MTBF, the absence of pump inlet bearings reduces the risk of contamination or process-related issues. On the outlet side, N2 barrier gas protects the exhaust and prevents contact with the pump bearings. Busch's unique vacuum pump design features, combined with technology that has proven itself over more than 20 years in the field, allows customers to save energy without taking risks on process reliability.

"Our new line of COBRA BC Premium Efficiency class of vacuum pumps targets the majority of semiconductor fab applications, including process, load lock and transfer applications," said Derek Shields, Director of Strategic Alliances for Busch, LLC. "With these new products, we've been able to retain the proven Busch pump design and reliability, and at the same time, achieve substantial energy savings. And we look forward to offering the same premium efficiency benefits with other Busch pump series in the near future."

For more information, please visit

About Busch Vacuum and Pump Systems
Headquartered in Virginia Beach, Virginia, Busch USA is a leading manufacturer of vacuum pumps, compressors, and blowers for a variety of industrial applications, including semiconductor manufacturing. Busch USA is a wholly owned subsidiary of Busch GmbH, a privately held, 50-year-old German company with operations in 39 countries around the world.

Contact Information

  • Company contact:
    Charity Buntz
    Marketing Specialist
    Email Contact

    Press contact:
    Lora Martinez
    Impress Labs
    Email Contact