SOURCE: Cambridge NanoTech

Cambridge NanoTech

June 27, 2011 00:00 ET

Cambridge NanoTech Expands ALD Research Capability

CAMBRIDGE, MA--(Marketwire - Jun 27, 2011) - Cambridge NanoTech at the cutting-edge of nanotechnology development, is pleased to announce the introduction of Self-Assembled Monolayers (SAMs) capability in their line of Savannah Atomic Layer Deposition (ALD) systems. SAMs coatings are inexpensive and versatile and can be used in a wide variety of applications including control of wetting and adhesion, chemical resistance, bio compatibility, sensitization, and molecular recognition for sensors and nano fabrication. Areas of application for SAMs include biology, electrochemistry, electronics, nanoelectromechanical systems (NEMS), microelectromechanical systems (MEMS), and everyday household goods.

"We are pleased to provide this functionality to the ALD community to further expand their research capabilities. SAMs coatings open up a fairly large application space which are not addressed by other coating technologies," said Ganesh Sundaram, Vice President of Technology. "The Savannah enhanced with SAMs capability offers greater flexibility because of its ability to deposit ALD and SAMs films in one chamber."

The SAMs capability is available from Cambridge NanoTech for deposition on 100mm, 200mm, and 300mm size substrates or smaller pieces. Cambridge NanoTech's current customer base of the Savannah line may upgrade their systems to include the SAMs capability. The cost to add the SAMs functionality to new and existing Savannah systems is also more affordable than deposition equipment that is completely dedicated to SAMs coatings on the market.

A Savannah with SAMs capability will be on display in Cambridge NanoTech's booth at the American Vacuum Society's ALD 2011 conference this week at the Royal Sonesta in Cambridge, Massachusetts.

For more information, visit or call 617-674-8800.

About Cambridge NanoTech
Cambridge NanoTech delivers Atomic Layer Deposition (ALD) systems capable of depositing ultra-thin films that are used in a wide variety of research and industrial applications. Our manufacturing ALD systems are used in the production of semiconductors, flat panel displays, and solid state lighting. Cambridge NanoTech research systems are used by world class scientists on five continents to study superior ALD film properties such as electrical, anti-bacterial, UV-blocking, and anti-reflection. To learn more about Cambridge NanoTech, please visit

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    Cambridge NanoTech
    Andrea Klos
    (617) 674 8800
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