SOURCE: Crossing Automation, Inc.

Crossing Automation, Inc.

December 04, 2011 18:00 ET

Crossing Automation Launches Novel DARTS™ FOUP Buffer

Near-Tool Buffering System Improves Wafer Storage and FOUP Movement Capabilities in Fab Environment

FREMONT, CA and CHIBA, JAPAN--(Marketwire - Dec 4, 2011) - Crossing Automation, Inc. (, a leading designer and manufacturer of fab and tool automation products used by today's foremost semiconductor device and equipment companies, introduced its Dynamic Access Recirculating Transport and Storage (DARTS™) FOUP buffer this week at SEMICON Japan. The DARTS FOUP Buffer offers a flexible, near-tool buffering system delivering benefits to both IC manufacturers and OEMs. Crossing has received multiple orders for its DARTS FOUP Buffer and the product is operating in a production environment.

"As manufacturing grows in complexity, process steps and product mix are increasing, and the number of FOUP moves is growing exponentially," said May Su, vice president, marketing for Crossing Automation. "The question becomes how to manage a fab under these conditions and increase productivity. The DARTS FOUP Buffer offers a modular, easily configured design that improves wafer storage and movement capabilities, thus contributing to significant productivity improvements and cost savings."

For IC manufacturers, implementing the DARTS FOUP Buffer in strategic locations as a near-tool buffer can increase tool utilization by up to 30 percent, resulting in a higher return on investment for the process or metrology tool. Fabs can also use the DARTS FOUP Buffer as an intra-bay mini-stocker. The integrated and proprietary Shuttle Lift FOUP hoist and gripper mechanism allows direct FOUP transfers between storage shelves and tool loadports independently from the OHT reducing overall AMHS traffic and bottlenecks in high throughput bays.

For equipment suppliers, the DARTS FOUP Buffer enables OEMs to maintain small tool footprints on high throughput tools by providing an alternative solution to using larger EFEMs with additional loadports. It delivers configurable storage capacity to meet OEM requirements and offers a cost-efficient solution for empty FOUP management.

The Crossing DARTS FOUP Buffer may be mounted under the ceiling, in a cleanroom bay aisle, or on top of a process tool. Its flexible design allows it to be implemented as an option to an OEM tool or as a standalone retrofit solution in existing fabs without any impact on floorspace.

To learn more about the DARTS FOUP Buffer, please visit Crossing Automation in the Hakuto Corporation booth, 6C-707, at SEMICON Japan or visit

About Crossing Automation
Crossing Automation is a leading designer and manufacturer of fab and tool automation equipment, recognized for solving the critical issues facing today's semiconductor device and equipment companies. The company increases fab productivity and reduces equipment costs by consistently delivering fast, reliable 200mm, 300mm and 450mm wafer and carrier handling products, supported by sophisticated control software. The company's solutions are available in multiple configurations to address the customer's desire for maximum flexibility. For more information, visit

Contact Information

  • Crossing Automation Contact
    May Su
    Vice President, Marketing
    Crossing Automation
    510 661 5009
    Email Contact

    Agency Contact (US/EU)
    Amy Smith
    Impress Labs
    401 369 9266
    Email Contact

    Agency Contact (Asia)
    Ina Chu
    Impress Labs
    217 766 1011
    Email Contact