June 26, 2012 11:15 ET

DFMSim Signs Distribution Agreement With Leading US Process Control Company

Customer Will Use DFMSim's Solutions to Augment Metrology and Inspection Tools With Enhanced Data Analysis Capabilities

PALO ALTO, CA--(Marketwire - Jun 26, 2012) - Semiconductor software solutions leader, DFMSim, today announced a distribution agreement with a leading US process control original equipment manufacturer (OEM) that involves the integration of DFMSim's SMARTlitho manufacturing software into new tools for advanced process control and process diagnostics. SMARTlitho is comprised of three powerful analysis tools: SMARToverlay and SMARTcd [Critical Dimension] for online analysis, and SMARTmodeler for offline analysis. Each helps characterize lithography-related process data. All are elements of DFMSim's broader product portfolio that also includes SMARTdesign and SMARTyield. Together they extract higher levels of intelligence across the fab that helps semiconductor manufacturers find and avoid costly systemic defects. For customers, this means better process tool and device performance, and higher overall yield.

The partnership is DFMSim's first deal with a metrology leader. The company has similar engagements with other players in the Integrated Circuit (IC) design-to-manufacturing community -- including a recent installation of SMARTyield at a development foundry in the US.

Semiconductor manufacturers have long relied on in-line process monitoring to control and predict manufacturability and yield in their fabs. Today, with geometries shrinking and process complexity increasing, it's challenging to maintain healthy yields and simultaneously drive down costs. Tighter linewidths alone have vastly expanded the scope of mandatory measurements -- from film thickness, to the width, height, length, depth and pitch of structural features on the surface of a layer and deep below the surface. Advanced technology to monitor and control the process at every step is more imperative than ever.

"Few technologies can influence cost savings in a fab more dramatically than process control," said DFMSim chief executive officer, Anantha Sethuraman. "And nowhere is process control more valuable than lithography. By combining our fab-wide analysis solutions with leading process control tools, we give our customers the best possible solution at the lowest cost of ownership. We look forward to collaborating with our process control OEMs and end customers to drive semiconductor manufacturing into future process nodes and keep pace with Moore's law."

DFMSim executives will be present at SEMICON West 2012 in San Francisco, July 10-12. To schedule a briefing on the company's IC design-to-manufacturing software solutions, please contact Karan Aujla at

To learn more about SMARTlitho manufacturing software, please visit

About DFMSim
DFMSim provides advanced enabling software solutions to the global semiconductor industry. The company's technology simulates key IC design and processing steps to quickly find and avoid systemic defects that threaten yields and increase manufacturing costs. DFMSim's solutions are versatile, modular, easy to use and can be rapidly configured for various manufacturing processes and tools. Headquartered in Silicon Valley, the company maintains R&D, sales and support offices in multiple global locations. For more information, please visit us at

Contact Information

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    Jane Evans-Ryan
    Genuity PR for DFMSim
    Tel: +1 408 489-6391
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