SOURCE: Mattson Technology, Inc.

Mattson Technology, Inc.

July 14, 2015 16:10 ET

Mattson Achieves a Major Milestone With Shipment of Its 100th Plasma Etch System

FREMONT, CA--(Marketwired - July 14, 2015) - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced wafer fabrication equipment used by semiconductor manufacturers, today announced that it has shipped its 100th plasma etch system since introducing its first etch product in 2009. This most recent shipment of a paradigmE XP has been installed to support volume production of advanced 3D NAND memory devices. The achievement of this milestone is representative of the market acceptance of Mattson's etch technology, which is supporting advanced DRAM, NAND and 3D NAND production.

The paradigmE XP, utilizing a unique and innovative Faraday-Shielded Dual Inductively Coupled Plasma source technology, is Mattson's most prolific plasma etch product. The paradigmE XP utilizes a platform based on the design of Mattson's Suprema system, which has been in used for over ten years in high volume production environments. In the process chamber, the paradigmE XP offers Dual Zone design features for plasma source, gas distribution, and wafer temperature control, allowing it to meet the advanced process and productivity requirements of leading edge memory device manufacturers and the needs of foundry companies developing advanced finFET technologies.

"We are pleased with reaching our 100th etch system shipment, which is the result of focused partnerships with our customers," stated Ryan Pakulski, Vice President and General Manager of Mattson Technology's Plasma Products Group. "We are currently developing solutions to increase our technical capabilities which will open more opportunities for our customers to realize the productivity advantages of Mattson etch systems. We look forward to continuing the partnerships with our customers to address the next generation of advanced etch requirements," added Pakulski.

About Mattson Technology, Inc.
Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in four primary product sectors: Dry Strip, Etch, Rapid Thermal Processing and Millisecond Anneal. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON / (510) 657-5900. Internet:

Contact Information

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    J. Michael Dodson
    Mattson Technology, Inc.
    tel +1-510-657-5900
    fax +1-510-492-5963