SOURCE: Mattson Technology, Inc.

March 14, 2011 06:30 ET

Mattson Technology Reinforces Leadership in Strip Market With Introduction of New SUPREMA XP5 Dry Strip System Designed to Deliver Industry's Highest Performance and Productivity

Advanced Photoresist System Delivers Speed, Efficiency for High-Volume Strip Applications

FREMONT, CA--(Marketwire - March 14, 2011) -  Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today introduced SUPREMA® XP5, its latest photoresist dry strip system designed to deliver the extendibility, performance, cost of ownership (CoO) and reliability that chipmakers require for high-volume production of current and future-generation logic, DRAM and flash memory devices. This newest addition to the company's family of innovative products is based on the production-proven, vacuum-based, high-throughput SUPREMA platform and proprietary Faraday-Shielded Inductively Coupled Plasma (ICP) source technology. SUPREMA XP5 provides the most flexible and cost-effective solution for advanced front-end-of-line (FEOL) and back-end-of-line (BEOL) strip applications using oxygen-based process chemistries.

"The introduction of SUPREMA XP5 reinforces Mattson Technology's commitment to delivering high-performance, reliability and productivity systems to our customers as they look to extend strip technology to advanced nodes," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group. "SUPREMA XP5 builds on Mattson Technology's production-proven SUPREMA platform and provides the best processing performance and CoO to meet current and next-generation requirements of oxygen-based process applications. This new product offering allows our customers to address their latest technological challenges without sacrificing reliability or productivity and further strengthens Mattson Technology's leading position in the strip market."

The SUPREMA XP5's modular platform utilizes a simplified vacuum-based wafer transfer architecture designed to meet next-generation strip requirements with improved CoO, increased reliability and best-of-class particle performance to meet next-generation cleanliness requirements. The system features a simplified, combined vacuum loadlock and transfer module with a unique architecture to enable faster time to production and reduce the use of moving and consumable parts to lower chipmakers' total capital costs. SUPREMA XP5 provides the capability to run recipes at higher source power and features improved system packaging to simplify and lower costs related to installation, maintenance and serviceability.

SUPREMA XP5's patented Faraday-Shielded ICP source technology provides the industry's widest process window to achieve superior on-wafer processing results with the highest strip rates available today. Designed to address all oxygen-based strip process requirements, SUPREMA XP5 features reliable, high-speed vacuum and atmospheric robotics to deliver higher productivity with throughput of greater than 430 wafers per hour. The SUPREMA XP5 is positioned to set a new benchmark for strip performance, with exceptional process flexibility, efficiency, reliability and CoO for high-volume manufacturing of advanced chips down through the 2X nanometer (nm) node.

About Mattson Technology, Inc.

Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. The company is a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operates in three primary product sectors: dry strip, rapid thermal processing (RTP) and etch. Through manufacturing and design innovation, Mattson Technology produces technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. The company serves foundries, and memory and logic integrated device manufacturers in the United States, Europe, China, Japan, Korea, Singapore, Taiwan and other Asian countries. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: +1-800-MATTSON/+1-510-657-5900. Internet:

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10 K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Contact Information

  • Mattson Technology Contact
    Lauren Vu
    Mattson Technology, Inc.
    tel +1-510-492-6250
    fax +1-510-492-5930

    Investor Contact
    Laura Guerrant-Oiye
    Guerrant Associates
    tel +1-808-882-1467