SOURCE: MEMS Industry Group

July 10, 2008 08:00 ET

MEMS Industry Group Provides Member News Snapshot on Eve of SEMICON West

MIG Members Announce MEMS Devices for Automotive, Consumer Electronics, Medical; Offer New Solutions for MEMS Manufacturing

PITTSBURGH, PA--(Marketwire - July 10, 2008) - Booth 8811 - SEMICON West 2008 -- MEMS Industry Group (MIG), the unifying voice of the commercial microelectromechanical systems (MEMS) community, today provided a snapshot of recent news from its members prior to SEMICON West, held July 15-17, 2008 in San Francisco. Representing an industry which reached an estimated $5.6B in 2007, according to analyst group Yole Développement, MIG members include leading MEMS device manufacturers and development partners as well as MEMS-based component suppliers. Embedded in applications as divergent as game consoles, advanced drug delivery systems, vehicle stability control and mobile handsets, MEMS continues to proliferate in commercial and industrial applications, supplanting traditional semiconductor technologies in some markets.

"We encourage SEMICON West show attendees to utilize MIG as their guide to the MEMS industry," said Karen Lightman, managing director of MEMS Industry Group. "Through our new interactive Flash demo, 'MEMS in the Machine,' attendees can drill down into common applications like mobile handsets, game controllers and automobiles to view the MEMS inside the machine. We are also kicking off a Guitar Hero promotion which will award Guitar Hero game bundles to two lucky show attendees."

Ms. Lightman added: "We are also looking forward to speaking with SEMICON West attendees about recent advancements in the MEMS industry, from the device component and manufacturing technology side."

SEMICON West Member News

--  Silex Microsystems (Booth 8819) -- recently announced additional
    funding from existing and new investors. Silex is dedicating this new
    investment toward capacity increases and installation of a new 8-inch MEMS
    line. This expansion will enable Silex to meet capacity demand for current
    as well as new customers. It will also facilitate Silex's advancing ongoing
    programs on CMOS-MEMS integration such as direct bonding, zero cross talk
    and Via technologies as well as Wafer Level Packaging (WLP).
--  SVTC Technologies (Booths 5516 and 8716) -- will announce July 14 the
    expansion of its next-generation MEMS processing capabilities. SVTC has
    added equipment from fellow MIG members Lam Research Corp. and SUSS
    MicroTec to provide deep silicon etch, wafer bonding, proximity alignment
    and additional microlithography capabilities at SVTC's facilities.
--  Tegal Corporation (Booth 1921) -- will soon announce its new Compact
    360™ Nano-Layer Deposition (NLD) system, which improves film quality and
    system throughput for manufacturers of MEMS, nanotechnology, optoelectronic
    and advanced semiconductor components.

MIG Member News Recap

--  Acuity, Inc. -- announced its company launch on June 10. Founded by
    MEMS pioneers Jim Knutti and Henry Allen, Acuity is a fabless semiconductor
    company bringing to market a line of high-performance MEMS-based pressure
    sensors. The company also announced a production agreement with the MEMS
    foundry Semefab.
--  ACUTRONIC USA -- will announce July 14 the release of the AC-217 two-
    axis motion table, a new product aimed at providing manufacturers of
    inertial MEMS devices and inertial MEMS-based products a cost-effective
    solution for product testing.
--  Chipworks -- will soon release ICInside Surveyor, a new software tool
    that puts a virtual SEM microscope on the desktop, allowing companies to
    view, measure and annotate their competition's device layouts in detail
    using high-magnification image mosaics of thousands of SEM images.
--  Freescale -- announced Q2 2008 advancements in its MEMS-based sensors
    for in-vehicle networking. Freescale's MEMS-based sensors -- working with
    the company's FlexRay™ technology -- provide a smoother driving
    experience for the new BMW-X5 series. In June, Freescale announced the
    newest version of Red Octane's Guitar Hero® for the Xbox 360™ gaming
    system -- which uses Freescale's 3-axis accelerometer for the advanced tilt-
    motion sensing that gives gamers that 'rock star' experience.
--  MEI, LLC -- announced July 7 the introduction of its next-generation
    "Revolution" Automated, Multi-step Wet Processing System. The new
    "Revolution" System combines ease of process control with a rotary robot
    design and precision engineering to create a powerful, flexible tool with a
    minimal fab footprint. The system features easily managed IDX automation
    software, which provides increased control and programmability. In
    addition, the system's robotics handle, in a very small footprint, 300mm
    wafer carriers through multiple process steps.
--  STMicroelectronics -- announced June 23 with Debiotech the first
    prototype of its miniaturized insulin-delivery pump. The company also made
    some significant new product announcements in Q2 2008, including a new
    surface-mount MEMS single-axis yaw gyroscope for angular rate sensing in
    game controllers and navigation systems, and a new 3D orientation sensor,
    the company's first product in a new family of MEMS functional sensors.

MEMS Emerging Markets Presentations at TechXPOT

On Tuesday, July 15th, MEMS industry innovators will offer presentations on recent developments in the MEMS/microstructures (MST) market. All presentations will take place in the Emerging Markets TechXPOT Pavilion in Moscone West Hall, Level 2. The following MIG member companies are presenting:

--  10:30-10:50 a.m. "Real Consumer Volume: MEMS Devices are Entering High-
    Growth Applications" by Jean-Christophe Eloy, director general and general
    manager, Yole Développement (Booth 8714)
--  11:10-11:30 a.m. "iMEMS Everywhere: User Experiences for Hand Held
    Devices" by Rob O'Reilly, Director of Test, MEMS Division, Analog Devices
--  11:50 a.m.-12:10 p.m. "Silicon MEMS Solutions For Enabling High-End
    Camera Quality on Mobile Phones" by Shawn Maloney, VP, Marketing, Sales and
    Business Development, Siimpel Corporation
--  12:10-12:30 p.m. "Microvision's MEMS: New Technologies Ramping up to
    New Products" by Jason Tauscher, manager, MEMS Development, Microvision,
--  12:30-12:50 p.m. "New possibilities from MEMS displays" by Brian
    Gally, director of engineering, Qualcomm MEMS Technologies
--  3:00-3:20 p.m. "Deep Silicon Etch for MEMS: A High-Volume
    Manufacturing Report" by Steve Lassig, senior program manager, 3D
    Integration and MEMS Etch Group, Lam Research Corporation (Booth 1116 and
--  3:20-3:40 p.m. "A Unified Approach to High Productivity MEMS Release
    Processing" by Alan Atherton, senior technologist, Memsstar Technology
    (Booth 8712)
--  4:20-4:40 p.m. "Wafer Prober-Platforms for Comprehensive Wafer-level
    MEMS Tests" by Joshua M. Preston, Marketing Group Manager, SUSS MicroTec
    Test Systems (Booths 5639 and 7311)

Other MIG members exhibiting at SEMICON West include: Abbie Gregg, Inc. (Booth 5168); Brewer Science, Inc. (Booths 6156 and 8729); EV Group, Inc. (Booth 5429); MEMStaff (Booth 8815); National Institute of Standards & Technology (Booth 236); OMRON (Booth 6557); PRIMAXX, Inc. (Booth 2047); and Surface Technology Systems (Booths 2047 and 8443).

About SEMICON West

SEMICON West, North America's largest event dedicated to the global semiconductor, PV and microelectronics manufacturing supply chains, takes place at the Moscone Center in San Francisco, California, July 15-17, 2008. For more information, please visit:

Visit MIG's SEMICON West Booth at West Hall, #8811 to test drive "MEMS in the Machine" and to experience the MEMS-enabled Guitar Hero, as well as enter for a chance to win Red Octane's Guitar Hero.

About MEMS Industry Group

MEMS Industry Group is the trade association representing the MEMS and microstructures industries. The Association enables the exchange of non-proprietary information among members; provides reliable industry data that furthers the development of technology; and works toward the greater commercial development and use of MEMS and MEMS-enabled devices. More than 80 companies comprise MIG, including Analog Devices, Asia Pacific Microsystems, Bosch, Draper Laboratory, Freescale Semiconductor, GE Global Research and GE Sensing, Honeywell, IBM, IDT, Intel, Okmetic, OMRON, Proteus Biomedical, Qualcomm, STMicroelectronics, Taiwan Solutions Systems Corporation, Texas Instruments and Virtus Advanced Sensors. For more information, please contact MIG via phone: 412/390-1644, email: or visit

All product and company names are trademarks or registered trademarks of their respective holders.

Contact Information

  • PRESS CONTACTS (For Editors Only):
    MEMS Industry Group
    Karen Lightman
    Phone: 412/390-1644
    Email: Email Contact

    Vetrano Communications
    Maria Vetrano
    Phone: 617/876-2770
    Email: Email Contact