SOURCE: MV Products

MV Products

March 19, 2013 09:01 ET

MV Multi-Trap® Vacuum Pump Inlet Trap Stacks for 300 mm Wafer Fabrication Processes

NORTH BILLERICA, MA--(Marketwire - Mar 19, 2013) -  MV Products has announced that their high-capacity, modular vacuum pump inlet-exhaust traps can be stacked for semiconductor wafer fabrication processes which produce a lot of heavy particulates.

The MV Multi-Trap® 12" Vacuum Inlet Trap is a robust inlet-exhaust trap that can be stacked for 300 mm semiconductor wafer fabricators utilizing LPCVD, PECVD, and ALD processing. Featuring all stainless steel construction with a first stage knock-down baffle, two stacked traps can accumulate up to 2,500 cu. in. of solids, depending upon the process.

Increasing the number of wafer processing runs between maintenance intervals, two stacked MV Multi-Trap® 12" Vacuum Inlet Traps provide six stages of user-selectable filter elements. Filter elements include stainless steel and copper gauze, molecular sieve, activated alumina or charcoal, micro-rated pleated polypropylene, and Sodasorb®.

The MV Multi-Trap® 12" Vacuum Inlet Trap is priced from $2,495.00 per module. Price quotations are available upon request.

About Mass-Vac, Inc.

Protecting vacuum pumps, people and the environment, Mass-Vac, Inc. was founded in 1971 to serve customers in need of vacuum pump support and service. After years of field experience rebuilding vacuum pumps and analyzing the reasons why they failed, along with extensive research and development, the MV Products division was created. MV Products manufactures a complete line of vacuum inlet traps, exhaust traps, mist eliminators, and oil filtration systems for a wide range of manufacturing, laboratory, and commercial applications including universities and hospitals. 

Mass-Vac, Inc. specializes in solving the process contamination problems associated vacuum systems that are used with processes such as MOCVD, HVPE, PECVD, or LPCVD which generate high volumes of particulates. These processes, of course, are used in manufacturing green products such as solar cells, HB-LEDs, and Li-Ion batteries. Mass-Vac, Inc. is an active member of SEMI and the American Vacuum Society.

Contact Information

  • For more information contact:

    MV Products, Division of Mass-Vac, Inc.
    Herbert R. Gatti
    Marketing
    247 Rangeway Rd.
    P.O. Box 359
    No. Billerica, MA 01862-0359
    (978) 667-2393
    FAX (978) 671-0014
    e-mail: drolph@massvac.com (tech contact)
    www.massvac.com