SOURCE: MV Products

MV Products

September 06, 2011 11:26 ET

MV Products' Vacuum Pump Inlet or Exhaust Trap for LPCVD, PECVD, and ALD Processing

NORTH BILLERICA, MA--(Marketwire - Sep 6, 2011) - MV Products, a division of Mass-Vac, Inc., has a high capacity vacuum pump trap for collecting particulates at both the inlet and exhaust of semiconductor manufacturing processes that create large volumes of heavy particulates.

The MV Multi-Trap® 16" Vacuum Inlet Trap is designed for protecting vacuum pumps in semiconductor manufacturing processes that create a lot of heavy particulates and can also be installed on the vacuum pump exhaust, depending upon the process conditions. Capable of up to 2,500 cu. in. of solids accumulation, depending upon process, this robust vacuum inlet or exhaust trap is ideal for 300 mm semiconductor wafer fabricators utilizing LPCVD, PECVD, and ALD processing.

Featuring all stainless steel construction with a first stage knock-down baffle, the MV Multi-Trap® 16" Vacuum Inlet Trap can be stacked with up to six stages of user-selectable filter elements. Filter options include stainless steel and copper gauze, molecular sieve, activated alumina or charcoal, micro-rated pleated polypropylene, and Sodasorb®.

The MV Multi-Trap® 16" Vacuum Inlet and Exhaust Trap is priced from $4,795.00, depending upon configuration. Price quotations are available upon request.

About MV Products division of Mass-Vac, Inc.

Protecting vacuum pumps, people and the environment, Mass-Vac, Inc. was founded in 1971 to serve customers in need of vacuum pump support and service. The MV Products division was established after years of field experience rebuilding vacuum pumps and analyzing the reasons why they failed, along with extensive research and development. As a result, the firm has developed a complete line of vacuum inlet traps, exhaust traps, mist eliminators, and oil filtration systems for a wide range of manufacturing, laboratory, and commercial applications including universities and hospitals.

MV Products specializes in solving the process contamination problems associated vacuum systems that are used with processes such as MOCVD, HVPE, PECVD, or LPCVD which generate high volumes of particulates. These processes, of course, are used in manufacturing green products such as solar cells, HB-LEDs, and Li-Ion batteries. Mass-Vac, Inc. is an active member of SEMI and the American Vacuum Society.

Contact Information

  • For more information contact:

    MV Products, Division of Mass-Vac, Inc.
    Herbert R. Gatti
    247 Rangeway Rd. / P.O. Box 359
    No. Billerica, MA 01862-0359
    (978) 667-2393
    FAX (978) 671-0014
    e-mail: (tech contact)