SOURCE: SEMATECH

June 13, 2006 17:00 ET

SEMATECH Engineers Achieve Major Milestones in High-k Metal Gate Technology

Presentations at VLSI Highlight New Materials for nMOS Metal Gate Electrodes and a New Approach for Low Standby Power 45nm Transistors

HONOLULU, HI -- (MARKET WIRE) -- June 13, 2006 -- In two key presentations at the 2006 Symposium on VLSI Technology, SEMATECH engineers today shared technical details on metal electrode materials that can be used to build low threshold voltage (Vt) nMOS transistors with high-k dielectric, and also unveiled a new approach for creating advanced, low standby power transistors for the 45nm technology generation.

Husam Alshareef, project engineer in SEMATECH's Advanced Gate Stack program and a TI assignee, outlined the details of the first achievement, previously announced this spring, involving nMOSFETs with metal electrodes showing an effective workfunction of ~4.0eV. Capping a three-year project involving nearly 40 engineers at SEMATECH and collaborating universities and suppliers, the identification of nMOS metal gate electrode materials -- through the systematic screening of more than 250 material systems on various dielectrics -- represents a major milestone in the quest to fabricate working CMOS devices using metal gate and high-k dielectric stacks.

"From this work, we developed an understanding of how metal electrode materials and high-k dielectrics react, and how the effective workfunction of metal electrodes can be controlled to yield an effective workfunction close to that of doped polysilicon gates," said Byoung Hun Lee, manager of SEMATECH's Advanced Gate Stack program. "Our approach will enable the industry to implement metal electrodes with minimum modifications to current CMOS flow."

In a second VLSI presentation, S.C. Song, Material Evaluation Test Structure project manager at SEMATECH, unveiled a new approach and processes for creating advanced, low-power transistors that can be used for the 45 nm technology generation. Song described a dual high-k, dual metal gate (DHDMG) process for CMOS field-effect transistors (FETs) that was demonstrated by SEMATECH engineers earlier this year, which offers several advantages over previously reported dual metal gate integration approaches. The result is a highly manufacturable flow that can meet industry and ITRS targets for low stand-by power (LSTP) 45 nm technology generation.

"As CMOS devices continue to shrink, SiO2/polysilicon-based transistor structures have become increasingly difficult to scale," said Raj Jammy, director of SEMATECH's Front End Processes (FEP) Division. "For the 45 nm technology generation, high-k dielectrics and metal gate electrodes have become very attractive, especially for low-power technologies. But until now, there have been no practical approaches to dual metal gate integration."

The DHDMG process, developed by SEMATECH engineers in ATDF, SEMATECH's R&D wafer fab, allows high-k dielectric materials and their associated metal gates to be optimized in separate processing steps, eliminating the difficult integration problems that have plagued more conventional methodologies.

The new process is a flexible scheme that uses two different high-k films -- if needed -- and dual metal electrodes for nMOSFETs and pMOSFETs, respectively. This allows nMOSFETs and pMOSFETs to be optimized independently, thus avoiding the deleterious inter-mixing of gate stack materials that typically degrades threshold voltage and other performance characteristics. DHDMG is also more controllable, resulting in better-defined gate profiles. Ultimately, the process is relatively easy to implement, without the need for additional critical lithography levels or any significant increase in the number of additional steps.

"We have demonstrated a manufacturable solution for one of the most vexing problems facing advanced transistor development," Song stated. "The process details have been transferred to SEMATECH's member companies for their consideration and we will be working with their engineers on implementation."

SEMATECH's progress on both leading-edge nMOSFET metal electrode technology and the novel DHDMG process comes on the heels of last year's related breakthroughs in channel mobility and reliability of high-k metal gate transistors. "We've come a long way in our efforts to bring high-k metal gate technology into the practical realm," said Jammy, "and we're pleased to be able to share some of our results today with our industry colleagues."

SEMATECH is the world's catalyst for accelerating the commercialization of technology innovations into manufacturing solutions. By setting global direction, creating opportunities for flexible collaboration, and conducting strategic R&D, SEMATECH delivers significant leverage to our semiconductor and emerging technology partners. In short, we are accelerating the next technology revolution. For more information, please visit our website at www.sematech.org. SEMATECH, the SEMATECH logo, AMRC, Advanced Materials Research Center, ATDF, the ATDF logo, Advanced Technology Development Facility, ISMI and International SEMATECH Manufacturing Initiative are servicemarks of SEMATECH, Inc.

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