Semitool Names Klaus Pfeifer Vice President of Copper Interconnect and BEOL Cleans

KALISPELL, MT--(Marketwire - June 22, 2009) - Semitool, Inc. (NASDAQ: SMTL), a leading manufacturer of wafer processing equipment for the semiconductor industry, today announced it has promoted Klaus Pfeifer to vice president of the Company's Copper Interconnect and Back End of Line (BEOL) Cleans divisions. Pfeifer was previously general manager of Copper Interconnect, a position he has held since May 2006.

Larry Murphy, president and chief operating officer, said, "Klaus' technical expertise and leadership skill have been instrumental in advancing Semitool's industry position in copper ECD for the application of copper interconnects. We look forward to further leveraging his talent and experience within our BEOL Cleans business."

Prior to joining Semitool, Pfeifer was program manager for copper low-k integration with the interconnect division of SEMATECH. He also spent 18 years with Philips Semiconductors, where he worked with the SEMATECH consortium as program manager of interconnect in advanced dielectrics and metallization. Pfeifer holds a degree in physics (Diplom Physicist) from the University of Hamburg, Institute for Solid State Physics, Germany.

About Semitool, Inc.

Semitool designs, manufactures and supports highly engineered, multi-chamber single-wafer and batch wet chemical processing equipment used in the fabrication of semiconductor devices. The company's primary suites of equipment include electrochemical deposition systems for electroplating copper, gold, solder and other metals; surface preparation systems for cleaning, stripping and etching silicon wafers; and wafer transport container cleaning systems. The company's equipment is used in semiconductor fabrication front-end and back-end processes, including wafer-level packaging and through-silicon via. The Company's products also are used in solar cell (PV) production applications.

Headquartered in Kalispell, Montana, Semitool maintains sales and support centers in the United States, Europe and Asia. The company's stock trades on Nasdaq under the symbol SMTL. For more information, please visit the company's website at www.semitool.com.

Semitool is a registered trademark of Semitool, Inc.

Contact Information: Contacts: Semitool, Inc. Paul Siblerud Vice President 406.752.2107 Pfeiffer High Investor Relations, Inc. Geoff High 303.393.7044 www.pfeifferhigh.com