SOURCE: CyberOptics Semiconductor, Inc.

CyberOptics Semiconductor, Inc.

September 10, 2009 06:50 ET

Vibration-Monitoring Software for Wafer-Processing Equipment to Be Released at SEMICON Taiwan by CyberOptics Semiconductor, Inc.

Software Filters Out Accepted Vibration Frequencies in a Process to Identify Anomalies; CyberOptics to Demo Software at SEMICON Taiwan Booth 908 With Partner Taiwan Puritic Corp. (TPC)

BEAVERTON, OR--(Marketwire - September 10, 2009) - Engineers from a maker of wireless metrology devices for wafer processing equipment, CyberOptics Semiconductor, will release their latest vibration-monitoring software at SEMICON Taiwan and demonstrate how it helps fab engineers predict equipment failure and identify wafer-contamination sources to improve yield and cycle time.

CyberOptics engineers at SEMICON Taiwan will demonstrate how fab engineers identify vibration anomalies by filtering out acceptable acceleration offsets produced by regular slow-moving equipment or high-frequency noises between 1 to 200 Hz, according to Craig C. Ramsey, Ph.D., CyberOptics Semiconductor's general manager and CTO.

Ramsey said engineers are able to set low, high or band-pass filters of equipment vibration frequencies with the company's latest vibration-monitoring software. Engineers may, for instance, filter out vibrations of 20 Hz and below and monitor vibrations of 21 Hz and above.

The software gives engineers the ability to troubleshoot and conduct preventative maintenance (PM) for vibration-related contamination and downtime "more efficiently and accurately by accounting for the natural environment of each process and existing controls," Ramsey said.

"When you know the relationship between equipment and tools in a process, you can really begin to optimize for acceleration and vibration," Ramsey said. "Our team in Taiwan will walk engineers through vibration monitoring and how the data applies to the floor."

Ramsey added that CyberOptics' new AVS 1.6 for the WaferSense® Auto Vibration System (AVS) helps engineers "quickly contrast" vibration by equipment, run time and technician to set process controls. The software allows engineers to generate an overview CSV file in Excel that contains a color-coded summary table of peak accelerations and vibration excursion across multiple data log files.

Fab engineers analyze more narrow data with the software by comparing two waveforms from different data logs. Engineers lay a second log-file trace for time domain and frequency domain over the main trace. Users can also export a portion of a single data log to a CSV file, as well as an entire data log.

Engineers have the ability to select from one of three units of measurement when using the software: g-Force, GAL (acceleration in cm/s2) -- or Energy (g2sec), which is a "good indicator of how much vibration a piece of equipment experiences in a given period," Ramsey said.

CyberOptics' AVS is a wireless, wafer-like device that allows engineers to establish yield-based vibration standards for equipment and technicians, identify vibration sources and set acceptable acceleration parameters for equipment.

CyberOptics Semiconductor will demonstrate its set of vibration-monitoring applications, VibeView™ and VibeReview™, and its entire line of WaferSense metrology devices at SEMICON Taiwan at booth 908 with its distribution partner, Taiwan Puritic Corp. (TPC).

For more details on the software and download instructions, visit

The WaferSense family of devices includes the Airborne Particle Sensor (APS), Auto Leveling System (ALS2 Vertical), Auto Teaching System (ATS) and Auto Gapping System (AGS). Each device follows the processing life of a wafer and reports real-time metrology data.

About CyberOptics Semiconductor, Inc.

CyberOptics Semiconductor develops automated products that seamlessly measure critical parameters in semiconductor fabrication processes and equipment. The company's pioneering WaferSense® line includes wireless metrology devices for vibration, leveling, gapping, teaching and sensing airborne particles in semiconductor process equipment. The company is the largest producer of reflective wafer-mapping sensors and a leading provider of frame grabber machine vision boards under its HAMA Sensors™ and Imagenation™ brands. CyberOptics Semiconductor is a subsidiary of CyberOptics Corp. (NASDAQ: CYBE), one of the world's leading providers of process yield and throughput improvement solutions for the electronic assembly and semiconductor fabrication industries. For information, visit, e-mail or call 800-366-9131.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995: Statements regarding the Company's anticipated performance are forward-looking and therefore involve risks and uncertainties, including but not limited to: market conditions in the global SMT and semiconductor capital equipment industries; increasing price competition and price pressure on our product sales, particularly our SMT systems; the level of orders from our OEM customers; the availability of parts required for meeting customer orders; the effect of world events on our sales, the majority of which are from foreign customers; product introductions and pricing by our competitors; unanticipated costs or delays associated with the transition of engineering and manufacturing for SMT Systems to Singapore and other factors set forth in the Company's filings with the Securities and Exchange Commission.

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